- Код статьи
- 10.31857/S0132665124030024-1
- DOI
- 10.31857/S0132665124030024
- Тип публикации
- Статья
- Статус публикации
- Опубликовано
- Авторы
- Том/ Выпуск
- Том 50 / Номер выпуска 3
- Страницы
- 16-23
- Аннотация
- Изучен процесс формирования алмазоподобных углеродных пленок на поверхности монокристаллического кремния. Пленка формируется в результате плазмохимического разложения углеводородов (пропан, бутан) и последующего отжига в вакууме. Углеродная пленка формируется в виде алмазоподобных наночастиц диаметром около 8 нм. На границе кремниевой подложки и углеродной пленки формируются связи кремний-углерод, что обеспечивает высокую адгезию.
- Ключевые слова
- плазмохимическое разложение углеводороды алмазоподобная пленка микротвердость
- Дата публикации
- 16.09.2025
- Год выхода
- 2025
- Всего подписок
- 0
- Всего просмотров
- 5
Библиография
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